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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Fabrication of Silicon Microprobes for Optical Near-Field Applications

Fabrication of Silicon Microprobes for Optical Near-Field Applications

Minh, Phan Ngoc
Takahito, Ono
Masayoshi, Esashi

Hardcover

Technology & EngineeringPhysics

ISBN10: 0849311543
ISBN13: 9780849311543
Publisher: Crc Pr Inc
Published: Jan 15 2002
Pages: 192
Weight: 0.90
Height: 0.60 Width: 5.74 Depth: 10.34
Language: English
Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.

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