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Fabrication of GAAS Devices
Paperback
ISBN13: 9781849190671
Publisher: Institute of Electrical Engineers of Japan
Published: Feb 1 2023
Pages: 370
Weight: 1.45
Height: 0.77 Width: 7.44 Depth: 9.69
Language: English
This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. This book is suitable for both new and practising engineers.
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