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Electroceramic-Based Mems: Fabrication-Technology and Applications

Electroceramic-Based Mems: Fabrication-Technology and Applications

Paperback

Series: Electronic Materials: Science & Technology, Book 9

Technology & Engineering

ISBN10: 1441936041
ISBN13: 9781441936042
Publisher: Springer Nature
Published: Dec 6 2010
Pages: 414
Weight: 1.31
Height: 0.87 Width: 6.14 Depth: 9.21
Language: English
Applications and Devices.- MEMS-Based Thin Film and Resonant Chemical Sensors.- Microactuators Based on Thin Films.- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films.- Thick-Film Piezoelectric and Magnetostrictive Devices.- Micromachined Infrared Detectors Based on Pyroelectric Thin Films.- RF Bulk Acoustic Wave Resonators and Filters.- High Frequency Tuneable Devices Based on Thin Ferroelectric Films.- MEMS for Optical Functionality.- Materials, Fabrication-Technology, and Functionality.- Ceramic Thick Films for MEMS.- Thin Film Piezoelectrics for MEMS.- Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices.- Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics.- Microfabrication of Piezoelectric MEMS.- Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics.- Low-Cost Patterning of Ceramic Thin Films.

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