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612-822-4611
Design a Ring HDP Semiconductor Plasma dry etcher

Design a Ring HDP Semiconductor Plasma dry etcher

Paperback

Technology & Engineering

ISBN13: 9798560791438
Publisher: Independently Published
Published: Nov 8 2020
Pages: 138
Weight: 0.43
Height: 0.30 Width: 6.00 Depth: 9.00
Language: English
A special shape of cylinder metal roller is designed for the truly seamless anti-fake product. And it is manufactured by the traditional lithography and electroforming process. However, it is suffered by the complex manufacturing procedure and complicated chemical parameters then the yield rate is not as expected from the original designing concept.In order to overcome the difficulties of the manufacturing procedures, the novel concept of ring shape HDP plasma dry etching of metal roller from semiconductor IC process is proposed and applied to patent.

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Technology & Engineering