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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Crucial Issues in Semiconductor Materials and Processing Technologies

Crucial Issues in Semiconductor Materials and Processing Technologies

Coffa, S.
Priolo, F.
Rimini, Emanuele

Hardcover

Series: NATO Science Series E:, Book 222

Technology & EngineeringGeneral Science

ISBN10: 0792320034
ISBN13: 9780792320036
Publisher: Springer Nature
Published: Oct 31 1992
Pages: 538
Weight: 2.12
Height: 1.25 Width: 6.14 Depth: 9.21
Language: English
Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

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