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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
CMOS Hotplate Chemical Microsensors

CMOS Hotplate Chemical Microsensors

Graf, Markus
Barrettino, Diego
Baltes, Henry P.

Hardcover

Series: Microtechnology and Mems

Technology & EngineeringChemistry

ISBN10: 3540695613
ISBN13: 9783540695615
Publisher: Springer Nature
Published: Apr 3 2007
Pages: 125
Weight: 0.80
Height: 0.51 Width: 6.35 Depth: 9.38
Language: English

This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics. The book provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field.

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