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Chemistry of the Semiconductor Industry

Chemistry of the Semiconductor Industry

Hardcover

Technology & Engineering

ISBN10: 0216920051
ISBN13: 9780216920057
Publisher: Springer Nature
Published: Feb 28 1989
Pages: 426
Weight: 1.75
Height: 1.00 Width: 6.14 Depth: 9.21
Language: English
This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.

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Technology & Engineering