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Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films

Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films

Hardcover

Technology & EngineeringChemistry

ISBN10: 1402076886
ISBN13: 9781402076886
Publisher: Springer Nature
Published: Nov 30 2003
Pages: 102
Weight: 0.73
Height: 0.51 Width: 6.40 Depth: 9.52
Language: English
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.

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