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An Introduction to Surface-Micromachining

An Introduction to Surface-Micromachining

Hardcover

Series: Information Technology: Transmission, Processing & Storage

Technology & Engineering

ISBN10: 1402080204
ISBN13: 9781402080203
Publisher: Springer Nature
Published: Jun 3 2004
Pages: 189
Weight: 1.08
Height: 0.68 Width: 6.28 Depth: 9.52
Language: English
An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.

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