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Advanced Lithography
Hardcover
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ISBN10: 1632380161
ISBN13: 9781632380166
Publisher: Ny Research Pr
Published: Feb 9 2015
Pages: 260
Weight: 1.14
Height: 0.63 Width: 6.00 Depth: 9.00
Language: English
ISBN13: 9781632380166
Publisher: Ny Research Pr
Published: Feb 9 2015
Pages: 260
Weight: 1.14
Height: 0.63 Width: 6.00 Depth: 9.00
Language: English
This book presents state-of-the-art information regarding the extensive field of advanced lithography. Advanced lithography expands into numerous sub-fields like micro electro-mechanical system (MEMS), nano-lithography, nano-physics, etc. In optimized electron device, nano-lithography reaches up to 20 nm in size. Subsequently, we have to analyze and develop true single nanometer size lithography. One of the solutions is to analyze a fusion of bottom up and top down technologies like EB drawing and self-assembly with block copolymer. In nano-photonics and MEMS, 3D structures are required for carrying out specific functions in the devices for applications. They are formed as a result of execution of numerous techniques like stereo-lithography, sputtering, colloid lithography, deposition, dry etching, etc. This book provides the readers with valuable information about nano structure, 3D structure, nano-lithography, and elucidates the methodology, techniques and applications of nano-lithography.
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