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Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration

Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration

Paperback

Series: Microtechnology and Mems

Technology & Engineering

ISBN10: 364206910X
ISBN13: 9783642069109
Publisher: Springer Nature
Published: Nov 18 2010
Pages: 358
Weight: 1.18
Height: 0.79 Width: 6.14 Depth: 9.21
Language: English
Focus of the Book.- Theoretical Aspects and Closed Form Analysis.- Piezoelectric Materials.- Linear Theory of Piezoelectric Materials.- Theory of the Static Behavior of Piezoelectric Beam Bending Actuators.- Piezoelectric Beam Bending Actuators and Hamilton's Principle.- Theory of the Dynamic Behavior of Piezoelectric Beam Bending Actuators.- Network Representation of Piezoelectric Multilayered Bending Actuators.- Measurement Setup and Validation of Theoretical Aspects.- Measurement Setup for Piezoelectric Beam Bending Actuators.- Measurements and Analytical Calculations.- Sensor Integration for Tip Deflection Measurements.- Piezoelectric Beam Bending Actuator with Integrated Sensor.- Tip Deflection Measurement - Capacitive Sensor Principle.- Tip Deflection Measurement - Inductive Sensor Principle.- Conclusion.

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