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Nanopositioning Technologies: Fundamentals and Applications

Nanopositioning Technologies: Fundamentals and Applications

Paperback

Technology & Engineering

ISBN10: 3319795392
ISBN13: 9783319795393
Publisher: Springer Nature
Published: Mar 30 2018
Pages: 409
Weight: 1.28
Height: 0.85 Width: 6.14 Depth: 9.21
Language: English
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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