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612-822-4611
Micromachining: Scanning Probe Lithography

Micromachining: Scanning Probe Lithography

Paperback

General Reference

ISBN10: 1090363265
ISBN13: 9781090363268
Publisher: Independently Published
Published: Mar 13 2019
Pages: 82
Weight: 0.63
Height: 0.21 Width: 8.50 Depth: 11.00
Language: English
This book describe how nanoscale resist patterns technology were machined or fabricated on a silicon substrate using a scanning probe microscope (SPM) based on nanolithography (SPNL). The advantage by using this technology is the low cost of nanopatterning device technology can be created, where an atomic force microscope (AFM) is used. Conventional SPNL directly writes nanopatterns using a single probe cantilever.

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General Reference