Open Daily: 10am - 10pm | Alley door pickup 10am - 7pm 3038 Hennepin Ave Minneapolis, MN
612-822-4611

  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers

High-sensitivity, Low-noise Multi-axis Capacitive Micro-accelerometers

Chae, Junseok

Paperback

Technology & Engineering

ISBN10: 3639184289
ISBN13: 9783639184280
Publisher: Blues Kids Of Amer
Published: Aug 5 2009
Pages: 180
Weight: 0.60
Height: 0.41 Width: 6.00 Depth: 9.00
Language: English
High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive multi-axis accelerometers. In order to achieve micro-g resolution, two different structures have been utilized: a Silicon-On-Glass (SOG) accelerometer, and an all-silicon accelerometer. A monolithic fabrication technique for Post-CMOS MEMS is also developed. Finally, a 3-axis single-chip accelerometer is presented. The 3-axis accelerometer shows >3pF/g sensitivity and sub-μg/rtHz mechanical noise floor. The 3-axis accelerometer with the readout circuit provides noise floor of 1.6μg/rtHz and 1.1μg/rtHz for in-plane and out-of- plane devices, respectively.

Also in

Technology & Engineering

View All