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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms

CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms

Paperback

Series: Microtechnology and Mems

Technology & EngineeringPhysics

ISBN10: 3642061524
ISBN13: 9783642061523
Publisher: Springer Nature
Published: Oct 22 2010
Pages: 232
Weight: 0.76
Height: 0.51 Width: 6.14 Depth: 9.21
Language: English
Overview of CCD.- CCD Imaging in the Ultraviolet (UV) Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Si.- UV Laser Induced Effects in SiO2.- UV Laser Induced Effects at the Si-SiO2 Interface.- CCD Measurements at 157nm.- Design Optimizations for Future Research.- Concluding Remarks.

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