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Modelling of Microfabrication Systems
Hardcover
Series: Microtechnology and Mems
Technology & EngineeringGeneral MathematicsGeneral Science
ISBN13: 9783540002529
Publisher: Springer Nature
Published: Jun 13 2003
Pages: 270
Weight: 1.24
Height: 0.80 Width: 6.40 Depth: 9.50
Language: English
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
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