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Modelling of Microfabrication Systems
Paperback
Series: Microtechnology and Mems
Technology & EngineeringGeneral MathematicsGeneral Science
ISBN13: 9783642055362
Publisher: Springer Nature
Published: Dec 8 2010
Pages: 270
Weight: 0.87
Height: 0.59 Width: 6.14 Depth: 9.21
Language: English
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
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