Open Daily: 10am - 10pm | Alley door pickup 10am - 7pm 3038 Hennepin Ave Minneapolis, MN
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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Polycrystalline Silicon for Integrated Circuit Applications

Polycrystalline Silicon for Integrated Circuit Applications

Kamins, Ted

Hardcover

Series: The Springer International Engineering and Computer Science, Book 45

Technology & EngineeringGeneral Gardening

ISBN10: 0898382599
ISBN13: 9780898382594
Publisher: Springer Nature
Published: Jan 31 1988
Pages: 290
Weight: 1.38
Height: 1.24 Width: 6.52 Depth: 9.54
Language: English
Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa- tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of the structure formed. This monograph is an attempt to synthesize much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon so that it can be used most effectively to enhance device and integrated-circuit perfor- mance. As device performance improves, however, some of the proper- ties of polysilicon are beginning to restrict the overall performance of integrated circuits, and the basic limitations of the properties of polysili- con also need to be better understood to minimize potential degradation of circuit behavior.

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