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Plasma Electronics: Applications in Microelectronic Device Fabrication
Hardcover
Technology & EngineeringPhysics
ISBN13: 9781041192237
Publisher: CRC Press
Published: May 14 2026
Pages: 389
Weight: 1.70
Height: 0.94 Width: 6.14 Depth: 9.21
Language: English
Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes.
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