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Plasma Electronics: Applications in Microelectronic Device Fabrication

Plasma Electronics: Applications in Microelectronic Device Fabrication

Hardcover

Technology & EngineeringPhysics

ISBN10: 1482222051
ISBN13: 9781482222050
Publisher: CRC Press
Published: Aug 27 2014
Pages: 412
Weight: 1.54
Height: 1.00 Width: 6.30 Depth: 9.10
Language: English

Emphasizing computational algorithms and techniques, this updated edition of a popular monograph provides a complete picture of plasma physics, computational methods, cutting-edge applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. This edition reflects recent progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process.

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