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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Paperback

Series: Springer Theses

Technology & EngineeringGeneral SciencePhysics

ISBN10: 3642426867
ISBN13: 9783642426865
Publisher: Springer
Published: Jul 17 2014
Pages: 204
Weight: 0.72
Height: 0.48 Width: 6.14 Depth: 9.21
Language: English
Theory of Perturbation of the Reflectance.- Theory of Perturbation of the Refractive Index.- Theory of Carrier and Heat Transport in Homogeneously Doped Silicon.- Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers.- Assessment of the Model.- Application of the Model to Carrier Profling.

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