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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Hardcover

Series: Springer Theses

Technology & EngineeringGeneral SciencePhysics

ISBN10: 364230107X
ISBN13: 9783642301070
Publisher: Springer
Published: Jun 28 2012
Pages: 204
Weight: 1.00
Height: 0.70 Width: 6.20 Depth: 9.20
Language: English
Theory of Perturbation of the Reflectance.- Theory of Perturbation of the Refractive Index.- Theory of Carrier and Heat Transport in Homogeneously Doped Silicon.- Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers.- Assessment of the Model.- Application of the Model to Carrier Profling.

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