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Temperature Measurement During Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers
Paperback
Series: Matwerk
Technology & EngineeringPhysics
ISBN13: 9783658113872
Publisher: Springer Nature
Published: Jan 14 2016
Pages: 112
Weight: 0.42
Height: 0.33 Width: 5.83 Depth: 8.27
Language: English
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
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