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Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids
Paperback
Series: Topics in Applied Physics, Book 47
ChemistryGeneral SciencePhysics
ISBN13: 9783662308882
Publisher: Springer
Published: Aug 23 2014
Pages: 284
Weight: 0.93
Height: 0.63 Width: 6.14 Depth: 9.21
Language: English
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