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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
Paperback
Series: Topics in Applied Physics, Book 64
Technology & EngineeringPhysics
ISBN13: 9783662311042
Publisher: Springer
Published: Aug 23 2014
Pages: 415
Weight: 1.34
Height: 0.89 Width: 6.14 Depth: 9.21
Language: English
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