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Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to Mev Energies
Paperback
Series: Topics in Applied Physics, Book 110
Technology & EngineeringPhysics
ISBN13: 9783642079443
Publisher: Springer Nature
Published: Nov 23 2010
Pages: 509
Weight: 1.61
Height: 1.06 Width: 6.14 Depth: 9.21
Language: English
Earlier books on this subject, i.e. Sputtering by Particle Bombardment I - III are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results to provide a state-of-the-art report covering theoretical as well as experimental aspects of sputtering. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems.
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