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Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

Hardcover

Series: Springer Optical Sciences, Book 45

General SciencePhysics

ISBN10: 3540639764
ISBN13: 9783540639763
Publisher: Springer Nature
Published: Sep 17 1998
Pages: 529
Weight: 1.96
Height: 0.99 Width: 6.38 Depth: 9.53
Language: English
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

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