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Predictive Simulation of Semiconductor Processing: Status and Challenges
Hardcover
Series: Springer Materials Science, Book 72
Technology & EngineeringGeneral SciencePhysics
ISBN13: 9783540204817
Publisher: Springer Nature
Published: May 5 2004
Pages: 490
Weight: 2.35
Height: 1.50 Width: 6.50 Depth: 9.70
Language: English
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
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