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Physics of Radiofrequency Capacitive Discharge
Paperback
ISBN13: 9780367571627
Publisher: CRC Press
Published: Jun 30 2020
Pages: 322
Weight: 1.10
Height: 0.80 Width: 6.10 Depth: 9.10
Language: English
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.
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