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Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma

Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma

Paperback

Technology & EngineeringPhysics

ISBN10: 036788626X
ISBN13: 9780367886264
Publisher: CRC Press
Published: Dec 10 2019
Pages: 211
Weight: 0.73
Height: 0.49 Width: 6.14 Depth: 9.21
Language: English

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

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Physics