Open Daily: 10am - 10pm | Alley door pickup 10am - 7pm 3038 Hennepin Ave Minneapolis, MN
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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Nanofabrication: Nanolithography techniques and their applications

Nanofabrication: Nanolithography techniques and their applications

de Teresa, José María
Perez Murano, Francesc
Martín, José Ignacio

Hardcover

Series: Iop eBooks

Technology & EngineeringGeneral Science

ISBN10: 0750326069
ISBN13: 9780750326063
Publisher: Institute of Physics Publishing
Published: Dec 11 2020
Pages: 450
Weight: 2.19
Height: 1.00 Width: 7.00 Depth: 10.00
Language: English

A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications.

The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed and cost etc. At the end of this section, the reader will be able to decide which technique to use for different applications.

The second section explores more specific applications of the nanolithography techniques previously described as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.

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