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Microwave Discharges - Theory & Applications (Plasma Physics Series)

Microwave Discharges - Theory & Applications (Plasma Physics Series)

Hardcover

Technology & EngineeringPhysics

ISBN10: 1934939080
ISBN13: 9781934939086
Publisher: Wexford College Pr
Published: Dec 28 2007
Pages: 304
Weight: 1.33
Height: 0.69 Width: 6.14 Depth: 9.21
Language: English
Quoting from the preface, Most of the authors of this book are well known specialists in different areas of microwave plasma physics, technique and plasma processing. Topics cover all problems of theory, experiments and applications of microwave discharges and yield the state-of-the-art trends in discharge theory, modelling, and diagnostics, methods of microwave plasma generation, high and low pressure microwave discharges, interaction of microwaves with a plasma, applications of microwave plasma (surface treating, etching, film deposition, growth of structures, light sources, analytical chemistry, etc.) We hope that this book will be useful for all specialists who work in low temperature plasma physics and processing.

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