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Microcantilevers for Atomic Force Microscope Data Storage
Hardcover
Series: Microsystems, Book 1
Technology & EngineeringGeneral Computers
ISBN13: 9780792383581
Publisher: Springer Nature
Published: Oct 31 1998
Pages: 148
Weight: 0.93
Height: 0.60 Width: 6.32 Depth: 9.46
Language: English
Microcantilevers for Atomic Force Microscope Data Storage describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback).
The primary audience for Microcantilevers for Atomic Force Microscope Data Storage is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.
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