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Microscopy of Semiconducting Materials 1987, Proceedings of the Institute of Physics Conference, Oxford University, April 1987

Microscopy of Semiconducting Materials 1987, Proceedings of the Institute of Physics Conference, Oxford University, April 1987

Hardcover

Series: Institute of Physics Conference, Book 87

Technology & EngineeringPhysics

ISBN10: 0854981780
ISBN13: 9780854981786
Publisher: CRC Press
Published: Oct 1 1987
Pages: 820
Weight: 2.89
Height: 1.69 Width: 6.14 Depth: 9.21
Language: English
Microscopy of Semiconducting Materials 1987 highlights the progress that is being made in semiconductor microscopy, primarily in electron probe methods as well as in light optical and ion scattering techniques. The book covers the state of the art, with sections on high resolution microscopy, epitaxial layers, quantum wells and superlattices, bulk gallium arsenide and other compounds, properties of dislocations, device silicon and dielectric structures, silicides and contacts, device testing, x-ray techniques, microanalysis, and advanced scanning microscopy techniques.

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Physics