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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

Acar, Cenk
Shkel, Andrei

Hardcover

Series: Mems Reference Shelf

Technology & EngineeringGeneral Mathematics

ISBN10: 0387095357
ISBN13: 9780387095356
Publisher: Springer Nature
Published: Oct 23 2008
Pages: 260
Weight: 1.14
Height: 0.70 Width: 6.10 Depth: 9.30
Language: English

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

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