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Ion Sources

Ion Sources

Paperback

Technology & EngineeringPhysics

ISBN10: 3642085024
ISBN13: 9783642085024
Publisher: Springer
Published: Dec 3 2010
Pages: 476
Weight: 1.52
Height: 1.00 Width: 6.14 Depth: 9.21
Language: English
This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

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