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Ion Implantation and Synthesis of Materials

Ion Implantation and Synthesis of Materials

Paperback

Technology & EngineeringChemistryPhysics

ISBN10: 3642062598
ISBN13: 9783642062599
Publisher: Springer
Published: Feb 12 2010
Pages: 263
Weight: 0.87
Height: 0.59 Width: 6.14 Depth: 9.21
Language: English
General Features and Fundamental Concepts.- Particle Interactions.- Dynamics of Binary Elastic Collisions.- Cross-Section.- Ion Stopping.- Ion Range and Range Distribution.- Displacements and Radiation Damage.- Channeling.- Doping, Diffusion and Defects in Ion-Implanted Si.- Crystallization and Regrowth of Amorphous Si.- Si Slicing and Layer Transfer: Ion-Cut.- Surface Erosion During Implantation: Sputtering.- Ion-Induced Atomic Intermixing at the Interface: Ion Beam Mixing.- Application of Ion Implantation Techniques in CMOS Fabrication.- Ion implantation in CMOS Technology: Machine Challenges.

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Nastasi, Michael

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Physics