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Bewertung neuartiger metallorganischer Precursoren für die chemische Gasphasenabscheidung von Kupfer für Metallisierungssysteme der Mikroelektronik
Paperback
Technology & EngineeringElectricalGeneral Science
ISBN13: 9783638949118
Publisher: Grin Verlag
Published: Jun 17 2008
Pages: 104
Weight: 0.32
Height: 0.25 Width: 5.83 Depth: 8.27
Language: German
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