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Electron Kinetics and Applications of Glow Discharges

Electron Kinetics and Applications of Glow Discharges

Paperback

Series: NATO Science Series B:, Book 367

Physics

ISBN10: 1475785488
ISBN13: 9781475785487
Publisher: Springer Nature
Published: Mar 22 2013
Pages: 557
Weight: 2.16
Height: 1.16 Width: 7.00 Depth: 10.00
Language: English
This book resulted from the NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges, held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.

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