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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors

Hwang, Cheol Seong

Hardcover

Technology & EngineeringChemistryGeneral Computers

ISBN10: 1461480531
ISBN13: 9781461480532
Publisher: Springer Nature
Published: Oct 19 2013
Pages: 263
Weight: 1.15
Height: 0.79 Width: 6.43 Depth: 9.38
Language: English
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for memories covers both mass-produced memories, such as DRAM and Flash, and emerging memories, such as PCRAM and FeRAM. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes. The final section on ALD for machines looks at toolsets and systems hardware. Each chapter provides the history, operating principles, and a full explanation of ALD processes for each device.

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