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A User's Guide to Ellipsometry

A User's Guide to Ellipsometry

Paperback

Series: Dover Civil and Mechanical Engineering

Technology & EngineeringGeneral SciencePhysics

Publisher Price: $16.95

ISBN10: 0486450287
ISBN13: 9780486450285
Publisher: Dover Pubn Inc
Published: Jul 7 2006
Pages: 288
Weight: 0.66
Height: 0.56 Width: 5.64 Depth: 8.50
Language: English
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.

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